All-reliable-condition ultraviolet lasers have been commonly used in the fields of mechanical flaw detection, lithography, micromachining and drugs for some great benefits of modest quantity, lengthy lifetime, superior performance, good beam high-quality, broad tuning and slim spectral line, and so on. Using higher electrical power around-infrared coherent light supply as the basic frequency resource dependant on nonlinear tuning engineering, generating ultraviolet coherent radiation by multistage frequency conversion is regarded as an important solution to establish the ultraviolet coherent mild source.
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For illustration, The present concave OC could be replaced by a aircraft mirror which could mitigate the facility density to the surface of M1 plus the diamond. Additionally, applying large problems threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser within the 2nd Stokes wavelength could be higher adequate, along with its very good beam high quality, to deliver the ultimate DUV laser at 193 nm having a superior normal electric power.
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A result of the thermal lens influence during the good-state lasers, In the event the heating management is insufficient, It isn't straightforward to obtain the strong-state laser having a large electrical power as well as a large beam high quality simultaneously. Lately, with the event of The skinny disk laser and solitary-crystal fiber (SCF) laser, a substantial-electrical power laser at the fundamental wavelength (1 μm) were recognized with a superb beam top quality even with a TEM00 mode beam [4,24], which might be fantastic candidates for the basic from the DUV laser era. Yet another candidate for the elemental would be the large-power fiber laser which can be reached by coherent beam mixture with M2 benefit a lot less than one.
On the opposite side, the facility scaling on the NIR laser is another part to raise the average electricity on the 193-nm DUV laser. Because of the deficiency of the high-electric power amplification Answer in the NIR laser (such as at 1553 nm), nonlinear frequency processes for example optical parameter oscillation (OPO) could be applied to make a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also getting relative higher electrical power [21]. A short while ago, a diamond Raman laser showed its capability in accomplishing a superior energy as well as a superior conversion effectiveness for the 1st Stokes on the one-μm laser [22,23], which suggests the chance to generally be applied within the 193-nm DUV laser generation on account of its significant Raman attain and enormous frequency change.
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While in the scientific and industrial programs, the beam high quality from the DUV laser is additionally a crucial parameter. Significantly, the beam top quality in the DUV laser drastically impacts the laser machining outcomes. The beam quality of the DUV laser is decided by that of the basic laser along with the crystal for your frequency conversion. Lately, a higher-ability DUV laser (>ten W) at 258 nm was documented having a beam quality of M2 < one.5, which was created by FHG of a Yb:YAG laser at 1030 nm using the CLBO crystal [thirteen]. This laser would bring about a greater laser machining final result as compared to the preceding DUV lasers with bigger M2.
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The conversion performance from essential NIR to DUV is from 5% to 36% in accordance with the noted ends in Desk one. Expanding the conversion effectiveness will reduce the load on the look and setup of the basic laser amplifier along with the electric ability consumption. A great beam good quality of the basic laser may also lead on the increasing of the conversion performance along with the right electricity depth of your NIR and inexperienced laser in the SHG and FHG course of action, respectively. The best conversion efficiencies from NIR to green and green to DUV laser by use of CLBO crystal are 70% and about fifty%, respectively [twelve], which corresponds towards the conversion effectiveness of 35% from elementary to DUV.
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